http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022049361-A1

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filingDate 2021-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a69055c8e783fa1b9a63f261d0b89b94
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publicationDate 2022-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2022049361-A1
titleOfInvention Method for manufacturing ruthenium wiring
abstract A method for manufacturing a ruthenium wiring including (i) treating a metal surface including ruthenium using a first chemical solution including a compound having a functional group capable of coordinating to a ruthenium atom, and (ii) carrying out an etching treatment on the metal surface including ruthenium treated with the first chemical solution, using a second chemical solution.
priorityDate 2020-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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