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filingDate 2020-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78989393a80e4950facc26ab3fbb1cc0
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publicationDate 2021-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2021397259-A1
titleOfInvention Selective laser etching of layered fluidistors
abstract A method includes separately exposing selected portions of a first rigid substrate and a second rigid substrate to laser radiation, selectively etching the exposed portions of the first rigid substrate and the second rigid substrate using a chemical etchant and bonding the first rigid substrate to the second rigid substrate along a common interface to form a fluidic valve. The fluidic valve may be coupled to a fluidic haptics device, for example, which may be integrated into an artificial reality system.
priorityDate 2020-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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