| abstract |
A radiation-sensitive resin composition includes a polymer including a phenolic hydroxyl group, a compound represented by formula (1-1) or formula (1-2), and a compound represented by formula (2). In the formula (1-1), a sum of a, b, and c is no less than 1; at least one of R 1 , R 2 , and R 3 represents a fluorine atom or the like; and R 4 and R 5 each independently represent a hydrogen atom, a fluorine atom, or the like. In the formula (1-2), in a case in which d is 1, R 6 represents a fluorine atom or the like, and in a case in which d is no less than 2, at least one of the plurality of R 6 s represents a fluorine atom or the like; and R 8 represents a single bond or a divalent organic group having 1 to 20 carbon atoms. |