| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B2203-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B2203-017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B2203-016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-366
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-765
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-68 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-141
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-283 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-06 |
| filingDate |
2021-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eec33bc37ecd9b21bbaeda8e12201944
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c102cd80db7f40a0d8bc171d6f7efea6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_974454db14ddeaef8fa5be5f5329e9ea |
| publicationDate |
2021-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2021378061-A1 |
| titleOfInvention |
Ceramic heater and method of manufacturing the same |
| abstract |
A ceramic heater includes: a ceramic plate which is provided with a wafer placement surface on an upper surface and in which a heating resistor is internally embedded; a ceramic tubular shaft with an upper end bonded to a lower surface of the plate; and power feeding members which penetrate a peripheral wall part of the tubular shaft in a vertical direction, and are electrically connected to the heating resistor. The power feeding members are embedded in the peripheral wall part of the tubular shaft, and are in tight contact with a ceramic material of the tubular shaft. |
| priorityDate |
2019-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |