http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021327708-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c37b2841ba46658971f621a5069401c8
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02181
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45529
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45531
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02189
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00
filingDate 2019-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9de34e12b4a283ae6d193442a7d4ee2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_679254a4fc6b7a8995269753a47e14c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3229fd7d198d7565b4fef9faf850d36f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efca010ad6ddcdd0136c58be9c32eb34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1cce10c783dae13e3b8a862263e5b0f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52b5128cf115af1c1482056472b15ae5
publicationDate 2021-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2021327708-A1
titleOfInvention Precursor composition for forming metal film, metal film forming method using same, and semiconductor device comprising same metal film
abstract Proposed is a precursor composition for forming a metal film including a zirconium compound represented by any one of Chemical Formulas 1 to 3 and a hafnium compound represented by any one of Chemical Formulas 4 to 6.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022205099-A1
priorityDate 2018-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8028
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559527
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454545630
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66775
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9321
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559484
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID162293181
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415207654
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID162293180
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458434260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID948
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11723
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID945
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456370357
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID117630
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457765275
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419550829
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67105
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3609161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457019252
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457019001
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22007940
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559478
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6101811
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559537
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457019000
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457018999
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593577
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457060968
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226459332
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419596115
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539344
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23953
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID222
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457019253
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8071
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415818019
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24823
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490522
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395957

Total number of triples: 96.