| abstract |
A material for forming an organic film, including: a compound for forming an organic film shown by the following general formula (1A); and an organic solvent, where W 1 represents a tetravalent organic group, n1 an integer of 0 or 1, n2 an integer of 1 to 3, and R 1 an alkynyl group having 2 to 10 carbon atoms. A compound for forming an organic film is cured not only under air, but also under film formation conditions of inert gas, and forms an organic film having not only excellent heat resistance and properties of filling and planarizing a pattern formed on a substrate, but also favorable adhesion to a substrate, and a material for forming an organic film containing the compound, and a substrate for manufacturing a semiconductor device using the material, a method for forming an organic film using the material, and a patterning process using the material. |