| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f8ec03130bdaf885bde2b8dbc2f0063 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2201-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-1825
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-32 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32743
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-141
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-24 |
| filingDate |
2020-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6da5585c042209bd41609912fbac70b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2e2850e4c57623e71abcebb2453d9f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44104b88a5544d9e7085c3a3fced49a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49cbda37d316720a5a73d0f465581d8c |
| publicationDate |
2021-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2021305026-A1 |
| titleOfInvention |
Plasma polymerization apparatus and plasma polymerization method using the same |
| abstract |
A plasma polymerization apparatus is provided for forming a polymerization coating on an inner surface of an object. The plasma polymerization apparatus comprises a chamber, a gas supply, a monomer source, a first electrode, a second electrode, a power source, and a metal foil. The gas supply is connected to the chamber for filling the chamber with a working gas. The monomer source is connected to the chamber for providing a vaporized monomer material into the chamber. The first electrode is located at a first side of the chamber. The second electrode is located at a second side of the chamber. The power source is electrically connected to the first electrode and the second electrode for generating plasma. The metal foil is wrapped around an outer surface of the object and placed between the first electrode and the second electrode. A plasma polymerization method is also provided. |
| priorityDate |
2020-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |