| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c28d4ea320b90ed19f8de42eb1428cc8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2317-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2311-2669
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2311-2623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2311-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2317-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C31-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C29-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C29-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D71-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D61-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D69-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D15-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D71-36 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D71-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D71-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D15-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C29-80 |
| filingDate |
2021-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd0bedd29aaacd392a17bf65d929ba96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0293cc2f7e697d9171f3e9638bd5b34 |
| publicationDate |
2021-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2021300851-A1 |
| titleOfInvention |
Systems and Methods for Purifying Solvents |
| abstract |
The present disclosure is directed to methods and systems of purifying solvents. The purified solvents can be used for cleaning a semiconductor substrate in a multistep semiconductor manufacturing process. |
| priorityDate |
2020-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |