| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98f92c496e4f5c70f34681fb4bf526d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_63f3311174c6de900e4f483d0dfc28bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_31233e7e852a0f62cd3b22133bc6861b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6d66f00783e89ae71c7f92fa00f0f859 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0292
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4483
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00166 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B06B1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 |
| filingDate |
2021-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39249f364a7a133dbe20e2e42eed12f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12c8521f1d7716a5f2fc340379f63130
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c79afadcd6c64233341b45f734f45c1d |
| publicationDate |
2021-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2021285917-A1 |
| titleOfInvention |
Bottom electrode material stack for micromachined ultrasonic transducer devices |
| abstract |
An ultrasonic transducer device includes a bottom electrode layer of a transducer cavity disposed over a substrate. The bottom electrode layer includes a bottom layer of a first type metal; a top layer of the first type metal; a second type metal disposed between the bottom layer and the top layer; and at least one intermediate layer of the first type metal disposed between the bottom layer and the top layer, the at least one intermediate layer configured so as to define at least two discrete layers of the second type metal. |
| priorityDate |
2020-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |