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filingDate 2017-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2021278355-A1
titleOfInvention Method for manufacturing sample for thin film property measurement and analysis, and sample manufactured thereby
abstract The present invention relates to a method for manufacturing a sample for thin film property measurement and analysis, and a sample manufactured thereby and, more specifically, to: a method for manufacturing a sample capable of measuring or analyzing various properties in one sample; and a sample manufactured thereby.
priorityDate 2016-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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