| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1ee8c3751d7e78666a0707dd681e768b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-3206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56 |
| filingDate |
2018-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68443944e81f31fcf28a95ac5ec9c29a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_747f3b5c89661bee6c0c6b1f78b63cbf |
| publicationDate |
2021-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2021265602-A1 |
| titleOfInvention |
Vapor deposition mask, method for manufacturing vapor deposition mask, and method for manufacturing organic semiconductor element |
| abstract |
A vapor deposition mask ( 100 ) including: a magnetic metal member ( 20 ) including at least one first opening ( 25 ); and a layered member ( 30 ) that is arranged on the magnetic metal member ( 20 ) so as to cover the at least one first opening ( 25 ) and has a plurality of second openings ( 13 ) located in the at least one first opening ( 25 ), wherein: the layered member ( 30 ) includes a first layer (m 1 ) and a second layer (m 2 ) that is arranged between the first layer (m 1 ) and the magnetic metal member ( 20 ); and in the at least one first opening ( 25 ), at a first temperature that is greater than or equal to room temperature, an elastic modulus E1 of the first layer, a thickness a1 of the first layer, an internal stress σ1 of the first layer, an elastic modulus E2 of the second layer, a thickness a2 of the second layer and an internal stress σ2 of the second layer (where σ1 and σ2 are positive for tensile stress) satisfy Expressions (1) and (2) below: n σ1/ E 1−σ2/ E 2<0 (1)n n 0< a 1×σ1+ a 2×σ2 (2). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11785744-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022248562-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022165997-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023036369-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11788181-B2 |
| priorityDate |
2018-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |