| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32853 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-04 |
| filingDate |
2021-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d4efb466fa2c02b8be3289f70ce1520
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7344aa3bb20f38f0625950e08ef91f0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef86f5c96483a8d2581aae3b4058e0c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d9d6ff89134e5749141a863b7dc6d2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6700654df0f17e209be2ab02283299f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65fd983793de83404fb384d54a27a25f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44beb4e9bb8320caa3e0e6985c7dfe19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a59c52e18be37bc3574065d5de7ffa72 |
| publicationDate |
2021-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2021205858-A1 |
| titleOfInvention |
Conditioning chamber component |
| abstract |
A method for conditioning a component of a wafer processing chamber is provided. The component is placed in an ultrasonic conditioning solution in an ultrasonic solution tank. Ultrasonic energy is applied through the ultrasonic conditioning solution to the component to clean the component. The component is submerged in a megasonic conditioning solution in a tank. Megasonic energy is applied through the megasonic conditioning solution to the component to clean the component. |
| priorityDate |
2017-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |