| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8381805eba6d034fc77bd230dd02e6e2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-3308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-612 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-2252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-044 |
| filingDate |
2020-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e79fefcab7d53a1d6155659b26da0983
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ef7b93f36405ce5b3947fed959c5f63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73177fe6511e2043c668d721e3e56092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0df8425903946074f7f18e848d228990
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9629725aa59e7f88e8860987d87e2fe3 |
| publicationDate |
2021-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2021151288-A1 |
| titleOfInvention |
Apparatus and method for nanoscale x-ray imaging |
| abstract |
System and method for nanoscale X-ray imaging. The imaging system comprises an electron source configured to generate an electron beam along a first direction; an X-ray source comprising a thin film anode configured to receive the electron beam at an electron beam spot on the thin film anode, and to emit an X-ray beam substantially along the first direction from a portion of the thin film anode proximate the electron beam spot, such that the X-ray beam passes through the sample specimen. The imaging apparatus further comprises an X-ray detector configured to receive the X-ray beam that passes through the sample specimen. Some embodiments are directed to an electron source that is an electron column of a scanning electron microscope (SEM) and is configured to focus the electron beam at the electron beam spot. |
| priorityDate |
2019-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |