| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b5f60e15501324fd877c613f81d71042 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D45-16 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67121
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K7-20145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67144 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate |
2019-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_774c74aafa0dddbe2eb8efd64a8ecdc4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1165185185c12580361ad9966b32076f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ff154ac835e6cc93d22aad113314778 |
| publicationDate |
2021-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2021134621-A1 |
| titleOfInvention |
Apparatus having cooling line for collecting by-product in semiconductor manufacturing process |
| abstract |
Disclosed is an apparatus having a cooling line for collecting a by-product in a semiconductor manufacturing process. The apparatus includes: a housing (110) including an inner wall plate (111) on an inner wall thereof to collect a by-product while generating a vortex in exhaust gas which is temperature-controlled by a heater (140) while being introduced through a gas inlet of an upper plate; an internal collecting tower (150) including vertical plates, an upper cover plate, and vortex plates fitted to the vertical plates, and condensing the introduced exhaust gas to collect the by-product; a main cooling channel (160) cooling the exhaust gas by using coolant while passing through the internal collecting tower (150); and a multi-connection pipe (170) sequentially supplying the coolant to an upper plate cooling channel and a main cooling channel and discharging the coolant, by using a supply pipe and a discharge pipe provided outside the housing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023277972-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023311051-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113769532-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11462422-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11660563-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022143543-A1 |
| priorityDate |
2019-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |