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publicationDate 2021-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2021115302-A1
titleOfInvention Composition and method for selective oxide cmp
abstract A chemical mechanical polishing composition for polishing a substrate having a silicon oxygen material includes a liquid carrier, cubiform ceria abrasive particles dispersed in the liquid carrier, and at least one of an anionic compound and a nonionic compound.
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