http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021115301-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_77d821a31941b0dacaf79235402ebd4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_973fd4b8b31ba49ee9967003534e1eb0
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01F17-235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01F17-229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2002-54
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01F17-235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01F17-241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-16
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-16
filingDate 2020-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11483077245d2abac03613e21df1012b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2478dbd9ad63d45b10cfa4c23495a4a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21cbb8e10bec6e384449b21af85639ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f266d25bc2de53fd28cdf12495cfa45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb41a62fef5e99ee5d87f166a0c7c20d
publicationDate 2021-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2021115301-A1
titleOfInvention Self-stopping polishing composition and method
abstract A chemical mechanical polishing composition for polishing a substrate having a silicon oxygen material comprises, consists of, or consists essentially of a liquid carrier, cubiform ceria abrasive particles dispersed in the liquid carrier, a self-stopping agent, and a cationic polymer.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023028267-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023150245-A1
priorityDate 2019-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3840
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399566
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422993
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14753409
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID311373910
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393662
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID442474190
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411126
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399213
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23676152
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14753414
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394314
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395777
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226396167
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399508
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394161
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69684
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID235954468
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID938
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11378474
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4757
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226424813
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226540854
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83146
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID129196365
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15962220
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13028
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412258
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139378703
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226435692
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7527
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399643
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID120189
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7618
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412259
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9207
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID72
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399298
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9217
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9208
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID324380
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405504
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226414430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394485
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405505
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226415519
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406035455
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226400521
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226410854
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226400761
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7424
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413464
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7047
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78739
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395130
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227500805
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78882
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9210
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7124
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID117969449
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15120180
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226400074
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID312044457
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1043
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID156323
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226501432
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226410153
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17520
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412103
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405594
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136319
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7521
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1018
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID56988342
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18359659
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID64961
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226557063
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413831
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399377
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226400006
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226420192
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399378
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17881685
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226410284
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9230
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8369
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226420193
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226517376
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226420303
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226420194
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10328
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID386729588
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226551892
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226401602
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7220
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422829
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14150592
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10466073
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226398743
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136069
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID233984660
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227694703
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID77452
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57449
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8738
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226415812
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394128
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID689043
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17869
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226408848
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70451296
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8103
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID798
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6131
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226423759
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226396740
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11709
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226414017
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66644
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID135
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226414018
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226511370
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID233891897
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID243
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226414527
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID340333809
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226457894
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226420526
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID85702122
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID340333883
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226397247
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17111
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159797
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31256
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399221
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID333721587
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11535798
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226423215
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226398982
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5150145
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID333721593
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226398998
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6509
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405653
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9189
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227314776
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70420125
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID85702142
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226400121
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226424459
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18694569
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID643460
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399442
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226426758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8405
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226426759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17946677
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23676745
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226420543
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID33286
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID33287
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16773
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399446
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406399
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21059
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7108
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406400
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6854
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69014
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5282707
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID106429
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399811
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5282708
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID156274093
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226397482
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9215

Total number of triples: 220.