| abstract |
A polymer comprising: a first repeating unit comprising a tertiary ester acid labile group; and a second repeating unit of Formula (1): n n n n n n n n n n n n wherein R 1 to R 5 are as provided herein; R 2 and R 3 together do not form a ring; each A is independently a halogen, a carboxylic acid or ester, a thiol, a straight chain or branched C 1-20 alkyl, a monocyclic or polycyclic C 3-20 cycloalkyl, a monocyclic or polycyclic C 3-20 fluorocycloalkenyl, a monocyclic or polycyclic C 3-20 heterocycloalkyl, a monocyclic or polycyclic C 6-20 aryl, or a monocyclic or polycyclic C 4-20 heteroaryl, each of which is substituted or unsubstituted; and m is an integer of 0 to 4. |