| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-02 |
| filingDate |
2019-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6903c1a31494b0346e601d8ac4037916
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ece22972c4a9311c48654df4ab09d7ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18c5d9aba911b9e6102f0cc8b1da4b49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9946e25aa95ca9ef7fc90304a3109963
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19b67fc3ff267afac152825e6aa968c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8cca6d9dab003b57d5a27b6bf169828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29033f1085e73d901262b3d1745a5c18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_142c03552afb95739e0bc9d325aebcca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b88bbefe53927a4c8ae61b32b8b0655 |
| publicationDate |
2021-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2021098565-A1 |
| titleOfInvention |
Integrated circuits having dielectric layers including an anti-reflective coating |
| abstract |
In some examples, an integrated circuit comprises a substrate; a first metal layer and a second metal layer positioned above the substrate; a first composite dielectric layer located on the first metal layer, wherein the first composite dielectric layer comprises a first anti-reflective coating; a second composite dielectric layer positioned on the second metal layer, wherein the second composite dielectric layer comprises a second anti-reflective coating; and a capacitor metal layer disposed over the first composite dielectric layer. |
| priorityDate |
2019-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |