http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021088453-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b0f3034f877d959ebb214ad10d763c44 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8848 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-0683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2210-56 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-0203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02081 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-2441 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88 |
| filingDate | 2020-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9352448b3ee1dc10712cb15eb25e638 |
| publicationDate | 2021-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2021088453-A1 |
| titleOfInvention | Sample surface polarization modification in interferometric defect inspection |
| abstract | Defects are detected using data acquired from an interference channel and a polarization modification channel in an interferometer. The interference objective splits a polarized illumination beam into a reference illumination that is reflected by a reference surface without modification to the polarization, and a sample beam that is reflected by a sample surface, that may modify the polarization. Light from the sample beam with no change in polarization is combined with the reference illumination and directed to the interference channel, which may measure the reflectivity and/or topography of the sample. Light from the sample beam with modified polarization is directed to the polarization modification channel. The intensity of the light detected at the polarization modification channel may be used, along with the reflectivity and topography data to identify defects or other characteristics of the sample. |
| priorityDate | 2019-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.