| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L35-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L35-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2020-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8296c8df2f19788723d0b5618e02c04d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_505218b0894cc57fcc679b7e6d3bfd96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_602bfe35fe40ba33df27bb6904fb54f8 |
| publicationDate |
2021-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2021055656-A1 |
| titleOfInvention |
Resist composition, method of forming resist pattern, polymeric compound, and compound |
| abstract |
A resist composition including a resin component having a structural unit (a0) represented by general formula (a0) in which Va 0 represents a linear or branched alkylene group, a linear or branched fluorinated alkylene group, —Y 01 —O—C(═O)—Y 02 — or —Y 01 —C(═O)—O—Y 02 —; Y 01 and Y 02 each independently represents a linear or branched alkylene group; Ya 0 represents a carbon atom; Xa 0 represents a group which forms a monocyclic hydrocarbon group together with Ya 0 , provided that part or all of the hydrogen atoms of the cyclic hydrocarbon group may be substituted with a substituent; Ra 00 represents a hydrocarbon group which may have a substituent; provided that at least one of Xa 0 and Ra 00 has a carbon-carbon unsaturated bond at an α-position of Ya 0 . |
| priorityDate |
2019-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |