| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2d32a1324eb3a240649ffee8d475d63 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5384
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5386
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-552 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-552
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-528 |
| filingDate |
2019-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ad1529bddff4ce70dc12fca863efc21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1220547d70a6bd4f444414822feecd27 |
| publicationDate |
2021-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2021035918-A1 |
| titleOfInvention |
Semiconductor structure and fabrication method thereof |
| abstract |
A semiconductor structure includes a semiconductor substrate, a shielding structure, a ground terminal, and a through silicon via. The shielding structure is disposed over the semiconductor substrate and includes a first metal layer, a second metal layer, and a third metal layer. The first metal layer is disposed over the semiconductor substrate. The second metal layer is disposed over the first metal layer. The third metal layer is disposed over the second metal layer. The ground terminal is electrically connected to the third metal layer. The through silicon via is disposed over the semiconductor substrate and adjacent to the shielding structure. |
| priorityDate |
2019-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |