| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eccd894c99fea2d1c0c8735872bb2309
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3703
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-20 |
| filingDate |
2020-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33f5556864633e73cdfcdf55bc8c0433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14e7613e2298cc6f424a18a51519ea66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9054722ae62c780546a42d693795a01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10ff4475c03302e353ffae7a1f37ffa1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f80b218db705d11cd7c49c20ead80273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3190e7200fcdacab45da38898fdb56e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a22e8feedf4698f4d6f1c985d6ed15d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb57166a1742ac8136c2423c94828318 |
| publicationDate |
2020-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2020384510-A1 |
| titleOfInvention |
Substrate processing method and substrate processing apparatus |
| abstract |
A substrate processing method includes a processing liquid supplying step of supplying a processing liquid having a solute and a solvent to a front surface of a substrate, a processing film forming step of forming on the front surface of the substrate a processing film which holds a removal object present on the front surface of the substrate by solidifying or curing the processing liquid supplied to the front surface of the substrate, and a peeling step of peeling the processing film from the front surface of the substrate together with the removal object by supplying a peeling liquid to the front surface of the substrate, and the peeling step includes a penetrating hole forming step of forming a penetrating hole on the processing film by dissolving partially the processing film in the peeling liquid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022392780-A1 |
| priorityDate |
2018-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |