| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5cbba15f5ad2c093c1e0b13f210c0449 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H2242-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24585 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H7-0138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01P7-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32128 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H7-01 |
| filingDate |
2020-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2d2cbc1f62c2895adf5a036b22b9815 |
| publicationDate |
2020-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2020350140-A1 |
| titleOfInvention |
Apparatus and system for modulated plasma systems |
| abstract |
Plasma processing systems and methods are disclosed. The plasma processing system includes a high-frequency generator configured to deliver power to a plasma chamber and a low-frequency generator configured to deliver power to the plasma chamber. A filter is coupled between the plasma chamber and the high-frequency generator, and the filter suppresses mixing products of high frequencies produced by the high-frequency generator and low frequencies produced by the low-frequency generator. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022177845-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023086313-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021175050-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11189563-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11515123-B2 |
| priorityDate |
2018-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |