| abstract |
A cobalt electrodeposition composition comprising cobalt ions, and particular leveling agents comprising X 1 —CO—O—R 11 , X 1 —SO 2 —O—R 11 , X 1 —PO(OR 11 ) 2 , X 1 —SO—O—R 11 functional groups, wherein X 1 is a divalent group selected from (i) a chemical bond (ii) aryl, (iii) C 1 to C 12 alkandiyl, which may be interrupted by O atoms, (iv) an arylalkyl group —X 11 —X 12 —, (v) an alkylaryl group —X 12 —X 11 —, and (vi) —(O—C 2 H 3 R 12 ) m O—, R 11 is selected from H and C 1 to C 4 alkyl. R 12 is selected from H and C 1 to C 4 alkyl, X 12 is a divalent aryl group, X 11 is a divalent C 1 to C 15 alkandiyl group. |