| abstract |
A metal resist cleaning liquid including a solvent, an organic acid, and a compound (B) represented by general formula (b-1) shown below (In the formula, Rb 1 and Rb 2 each independently represents an alkyl group having 1 to 3 carbon atoms; Rb 3 and Rb 4 each independently represents a hydrogen atom or an alkyl group having 1 to 3 carbon atoms; Yb 1 represents a single bond, —O—, —S— or —N(Rb 5 )—; Rb 5 represents a hydrogen atom or an alkyl group having 1 to 3 carbon atoms; Yb 2 represents —O—, —S— or —N(Rb 6 )—; Rb 6 represents a hydrogen atom or an alkyl group having 1 to 3 carbon atoms; and n represents an integer of 0 to 3). |