| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a3bb4ae410da4be8184239adc5ab1c0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2020-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef3746a8e9a7dc93c4cd96f2dfa5f4a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31cd15cad83091de16735e469f46c8a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3a95f4cef26c8c5106ac588edb4c938 |
| publicationDate |
2020-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2020324316-A1 |
| titleOfInvention |
Vapor phase deposition of organic films |
| abstract |
Methods and apparatus for vapor deposition of an organic film are configured to vaporize an organic reactant at a first temperature, transport the vapor to a reaction chamber housing a substrate, and maintain the substrate at a lower temperature than the vaporization temperature. Alternating contact of the substrate with the organic reactant and a second reactant in a sequential deposition sequence can result in bottom-up filling of voids and trenches with organic film in a manner otherwise difficult to achieve. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11446699-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11728175-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11387107-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11094535-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11389824-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11654454-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11174550-B2 |
| priorityDate |
2015-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |