| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_520278049ae6d5edd47f3440abdc5a27 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61M2005-3131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2259-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2203-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2201-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61M5-3129
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32394
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-22 |
| filingDate |
2020-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7c78a85f4688a26fce66f8d569e9a98
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2533fa4eb6f7d8cbb38ef09b851d39a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12863c8a401d6fa2174f3fbbc35afd13 |
| publicationDate |
2020-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2020316644-A1 |
| titleOfInvention |
Plasma treatment apparatus for producing coatings |
| abstract |
An apparatus and to a method for treating layers using a plasma zone sealed from the outer atmospheric pressure are provided. The apparatus and method include a plasma reactor including a substrate carrier in form of a container receiving means, and a closing element that is joined with the substrate carrier by means of a lifting device. |
| priorityDate |
2011-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |