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publicationDate 2020-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2020312888-A1
titleOfInvention Active matrix substrate, optical shutter substrate, display device, and method for manufacturing active matrix substrate
abstract An active matrix substrate in which step-caused disconnection of a metal film in a contact hole does not easily occur includes a first to third insulating films and first to third metal films on a glass substrate and a contact hole electrically connecting the first and second metal film, the contact hole including first to third hole present respectively in the first to third insulating films, the first and third metal films being in contact with each other inside the first hole, the second insulating film and an oxide semiconductor film overlapping with each other in a region below the third hole, the second and third metal films being in contact with each other in a region above the first insulating film and either inside or below the third hole.
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