| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823456
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B69-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7841
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-775 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-775
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234 |
| filingDate |
2019-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d05f1f86d9fa7250567755f12c7d0d53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13d025559edc2387314189acef1872b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b90232432b1b2a1f0cdb01aa84d55af9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9109b68b55594387713c374f294c46cb |
| publicationDate |
2020-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2020287046-A1 |
| titleOfInvention |
Integrating nanosheet transistors, on-chip embedded memory, and extended-gate transistors on the same substrate |
| abstract |
Embodiments of the invention are directed to methods of fabricating devices on a substrate. A non-limiting example of the method includes performing memory fabrication operations to form a non-volatile memory device in a first region of the substrate, wherein the memory fabrication operations include forming a first region of a nanosheet stack over the first region of the substrate. The first region of the nanosheet stack includes nanosheet layers of a first type of semiconductor material alternating with nanosheet layers of a second type of semiconductor material. A first portion of the first region of the nanosheet stack is replaced with a control gate of the non-volatile memory device, and a charge trapping region of the non-volatile memory device is provided under the control gate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11417777-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4202997-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022218536-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021391477-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11417653-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11201243-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021375683-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022208989-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022246479-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11715779-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021066490-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4199099-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023068484-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11107886-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11264283-B2 |
| priorityDate |
2019-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |