| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5ff210e3d78ea49ac26c2ab3ffc01578 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31749
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-2873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-204 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-2813
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-30 |
| filingDate |
2020-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ca246bc217a1d784aa4da011c7a303f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c676b0ad36d85d796e37414ce12759b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2dc89ba2c3254bd1317d565498dd195
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27e83c23d1e9809a1d08afeaef428708 |
| publicationDate |
2020-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2020266031-A1 |
| titleOfInvention |
Method of preparing thin film sample piece and charged particle beam apparatus |
| abstract |
Provided are a thin film sample creation method and a charged particle beam apparatus capable of preventing a thin film sample piece from being damaged. The method includes a process of processing a sample by irradiating a surface of the sample with a focused ion beam (FIB) from a second direction that crosses a normal line to the surface of the sample to create a thin film sample piece and a connection portion positioned at and connected to one side of the thin film sample piece, a process of rotating the sample around the normal line, a process of connecting the thin film sample piece to a needle for holding the thin film sample piece, and a process of separating the thin film sample piece from the sample by irradiating the connection portion with a focused ion beam from a third direction that crosses the normal line. |
| priorityDate |
2019-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |