http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020208052-A1

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filingDate 2019-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2020-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2020208052-A1
titleOfInvention Etchant composition for etching metal film and method of forming pattern using the same
abstract An etchant composition for etching a metal film and a method of forming a pattern, the etchant composition including an acid etching agent, the acid etching agent including an inorganic acid or an organic acid; an auxiliary oxidant, the auxiliary oxidant including hydrogen peroxide or an amine oxide compound; and an organic solvent, the organic solvent including a compound having an unshared electron pair, and having a dielectric constant of about 17 to about 80.
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