| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2252-103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-102
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2247-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2247-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2279-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F23J2219-40 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D50-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D47-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D47-06 |
| filingDate |
2019-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40c1d695bbbcbd50e5a9287c9bf981d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d1c703af6c2572edc71a190d0d3f94d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0027b8cb4ac193780b060e2aa87eb54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b92939f58663391b902540bc387548ed |
| publicationDate |
2020-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2020197854-A1 |
| titleOfInvention |
Active wet scrubbing filtration system |
| abstract |
An active wet scrubbing filtration system for decontamination of a gas stream comprises components including one or more of: a) a vortexing apparatus which induces a contaminant-bearing gas into a helical flow; b) an initial scrubbing fluid spray section configured so as to project a spray of scrubbing fluid into the contaminant-bearing gas stream; c) an absorption structure; d) a condenser; and e) first and second scrubbing fluid decontamination systems that may be engaged or disengaged independently of each other. In some embodiments, the worksite comprises a clean room or one or more a semiconductor processing tools, which may include photolithography tools or photolithography tool clusters. In some embodiments, the active wet scrubbing filtration system may be useful in cleaning and recycling air or other process gasses for use in clean rooms or semiconductor processing tools. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114471081-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115155223-A |
| priorityDate |
2018-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |