| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-1414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-1428
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-1412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-1452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-1426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-1422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-148 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2059
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2012
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2019-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e28d934bc1bf4b9bde141f1c72eee9fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4699ade218e0560a1d1eb8893e8c9924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d77141942773d7111cd6a6c9bd6f46df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0af87f7f14f76735a6cd8f4c4a79a267 |
| publicationDate |
2020-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2020174369-A1 |
| titleOfInvention |
Resist composition and method of forming resist pattern |
| abstract |
A resist composition including a compound (D0) represented by general formula (d0) and a resin component (A1) has a structural unit (a0) in which a compound represented by general formula (a0-1) has a polymerizable group within the W 1 portion converted into a main chain (in formula (d0), Rd 01 represents a fluorine atom or a fluorinated alkyl group; In formula (a0-1), W 1 represents a polymerizable group-containing group; C t represents a tertiary carbon atom, and the α-position of C t is a carbon atom which constitutes a carbon-carbon unsaturated bond; R 11 represents an aromatic hydrocarbon group; or a chain hydrocarbon group; R 12 and R 13 each independently represents a chain hydrocarbon group, or R 12 and R 13 are mutually bonded to form a cyclic group). |
| priorityDate |
2018-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |