http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020147958-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2202-11 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1603 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14145 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1404 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1629 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1628 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1632 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1631 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1623 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14 |
| filingDate | 2019-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_133b4ad7b2e7908ebbc6f12cde6ea2c0 |
| publicationDate | 2020-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2020147958-A1 |
| titleOfInvention | Method of manufacturing substrate, method of manufacturing substrate stack and method of manufacturing liquid ejection head |
| abstract | A substrate having an obliquely running through hole is manufactured by arranging first and second masks each having an opening pattern on first and second surfaces, respectively, of the substrate, then forming cavities each facing an opening of the opening patterns from the respective surfaces by anisotropic dry etching, and making the cavities formed from the first surface and the cavities formed from the second surface communicate with each other to produce the through hole. The opening pattern of the first mask and the opening pattern of the second mask are arranged adjacently to or partially overlapping with each other as viewed from the direction orthogonal to the substrate. The opening area of at least one of the openings of the first and second masks are increased along the direction from the mask including the at least one opening toward the oppositely disposed mask. |
| priorityDate | 2018-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425270609 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69667 |
Total number of triples: 21.