| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-09517
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80896
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-09181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06524
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-08145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14627
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-06181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K39-32 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1469
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1464
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14636
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14643
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0688 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate |
2019-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e79fb54ab461ad7c54a6f6e4edb5063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_feaab9c675109e9c0a5257c1b7e0ab74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54f6b3ececf288b70fd476afe3ac7e42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f7a5245c57cb94b0f3be48644e57f5d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e0d9795c1dd7fbcb00bf54e3fa46923 |
| publicationDate |
2020-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2020135617-A1 |
| titleOfInvention |
Ion through-substrate via |
| abstract |
Various embodiments of the present disclosure are directed towards an integrated circuit (IC) including a first through substrate via (TSV) within a first semiconductor substrate. The first semiconductor substrate has a front-side surface and a back-side surface respectively on opposite sides of the first semiconductor substrate. The first semiconductor substrate includes a first doped channel region extending from the front-side surface to the back-side surface. The first through substrate via (TSV) is defined at least by the first doped channel region. A first interconnect structure on the front-side surface of the first semiconductor substrate. The first interconnect structure includes a plurality of first conductive wires and a plurality of first conductive vias, and the first conductive wires and the first conductive vias define a conductive path to the first TSV. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022310691-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11398516-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021134663-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11557572-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11610812-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022367415-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021391302-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023079072-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11233088-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11756886-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11289455-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11688757-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022216185-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021391376-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11756936-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022375789-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11690211-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022181313-A1 |
| priorityDate |
2018-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |