| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49f04b1dc6b9fcc2d8b159c5ebee364b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0816 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-361
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R33-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R33-0322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-0092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-0016 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R33-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-28 |
| filingDate |
2019-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94b1cac4dfc068a99d257ed75eb958f0 |
| publicationDate |
2020-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2020132629-A1 |
| titleOfInvention |
Inspection device and inspection method |
| abstract |
An inspection apparatus comprises a light output unit configured to output first light having a first wavelength and second light having a second wavelength, a magneto-optical crystal arranged so that a reflection film faces a measurement target, a light detection unit configured to detect the first light and the second light, and a light guide optical system configured to guide the first light and the second light toward the magneto-optical crystal and the measurement target, and guide the first light reflected by the magneto-optical crystal and the second light reflected by the measurement target toward the light detection unit. The light guide optical system comprises an optical path switching clement configured to perform switching between optical paths of a plurality of optical elements so that the first light and the second light are selectively incident on the light detection unit. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I770809-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I758088-B |
| priorityDate |
2015-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |