| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0922
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823842
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823821 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-49 |
| filingDate |
2018-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c539cdc4e52be2e966028227aeed4a42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5ad48dc1266dcaa419573620030bca9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e24ee7aa6294abecea582441d1f118de |
| publicationDate |
2020-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2020118888-A1 |
| titleOfInvention |
Gate formation scheme for n-type and p-type transistors having separately tuned threshold voltages |
| abstract |
Embodiments of the invention are directed to a method that includes forming a first channel fin in an n-type region of a substrate, forming a second channel fin in a p-type region of the substrate, and depositing a gate dielectric over the substrate and the first and second channel fins. A work function metal stack is deposited over the gate dielectric, the first fin in the n-type region, and the second fin in the p-type region. The work function metal stack over the gate dielectric and the first fin in the n-type region forms a first work function metal stack. The work function metal stack over the gate dielectric and the second fin in the p-type region forms a second work function metal stack. The first work function metal stack includes at least one shared layer of work function metal that is shared with the second work function metal stack. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11417653-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315835-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11127857-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020328299-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11380793-B2 |
| priorityDate |
2018-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |