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filingDate 2019-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d981fb050784e91fd2b3eacd752fb4e8
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publicationDate 2020-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2020079999-A1
titleOfInvention Etching composition and method for manufacturing semiconductor device using the same
abstract Provided are an etching composition and a method for manufacturing a semiconductor device using the same. According to embodiments, the etching composition may comprise from about 15 wt % to about 75 wt % of peracetic acid; a fluorine compound; an amine compound; and an organic solvent.
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