Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a4b3fbec4b2ca9303a13095cd2cce7db |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0315 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0171 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00269 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-1136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00277 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0058 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-113 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 |
filingDate |
2019-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d7b9a7304df15e058fe6a190142a303 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92cb99bcb2301d61c70b367636240f9b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ef1e2a8ed07c956678c8a6f2b53efd0 |
publicationDate |
2020-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2020079646-A1 |
titleOfInvention |
Encapsulated microelectromechanical structure |
abstract |
A semiconductor layer having an opening and a MEMS resonator formed in the opening is disposed between first and second substrates to encapsulate the MEMS resonator. An electrical contact that extends from the opening to an exterior of the MEMS device is formed at least in part within the semiconductor layer and at least in part within the first substrate. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023171025-A1 |
priorityDate |
2006-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |