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publicationDate 2020-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2020058566-A1
titleOfInvention Methods for assessing semiconductor structures
abstract Methods for assessing the quality of a semiconductor structure having a charge trapping layer to, for example, determine if the structure is suitable for use as a radiofrequency device are disclosed. Embodiments of the assessing method may involve measuring an electrostatic parameter at an initial state and at an excited state in which charge carriers are generated.
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