Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
filingDate |
2019-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9a05f507df5e833e72d83725bfa8cc2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7c06b538b57d4ecac4b9c24fd54b86d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5bb9977fa95a702752def9ec1f82298 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39c6e73983b7b0926d6cf54503db1b93 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a5f95e7b1a642048421c1cf19c5cd68 |
publicationDate |
2020-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2020056069-A1 |
titleOfInvention |
Polishing composition and method utilizing abrasive particles treated with an aminosilane |
abstract |
The inventive method comprises chemically-mechanically polishing a substrate with an inventive polishing composition comprising a liquid carrier and abrasive particles that have been treated with a compound. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102413115-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220025594-A |
priorityDate |
2007-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |