| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f55d63cbbec3a417702d174544b7be4e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-023 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-30 |
| filingDate |
2018-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b53d5e1f4754c2860e1f1337cbb034d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f29b96918e6233fd42c1a6c5e4af479d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_183fbd80ebe270d5868d9d2f4fc73266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ace1026c268a0dcb70b8d65fbc45ecbe |
| publicationDate |
2019-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2019377174-A1 |
| titleOfInvention |
Compact, high-performance mems-based optical shutter |
| abstract |
A micro-machined optical shutter includes an entry layer with a through-passage having an input side adapted to receive incoming light and an output side, and an exit layer with a through-passage having an input side comprising a pinhole and an output side. The entry and exit layers are vertically aligned, thereby providing an optical path such that light exiting the entry layer enters the exit layer via the pinhole unless the optical path is interrupted. An actuation plane positioned between the entry and exit layers comprises a shutter blade and an actuator arranged to move the shutter blade laterally with respect to the pinhole when actuated. The shutter blade preferably has a reflective angled surface such that, when the blade covers the pinhole, the angled surface redirects light on the optical path away from the pinhole, preferably into a micromachined beam dump. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10942198-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4187288-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4187289-A1 |
| priorityDate |
2018-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |