http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019371620-A1

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filingDate 2017-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe32bebb3746303450e50c9a54c8b7e9
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publicationDate 2019-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2019371620-A1
titleOfInvention Semi-insulating compound semiconductor substrate and semi-insulating compound semiconductor single crystal
abstract A semi-insulating compound semiconductor substrate includes a semi-insulating compound semiconductor, the semi-insulating compound semiconductor substrate being configured such that, on a major plane having a plane orientation of (100), a standard deviation/average value of specific resistance measured at intervals of 0.1 mm along equivalent four directions in a <110> direction from a center of the major plane, and a standard deviation/average value of specific resistance measured at intervals of 0.1 mm along equivalent four directions in a <100> direction from the center of the major plane are each not more than 0.1.
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Total number of triples: 31.