http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019333728-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e8efe21d920832d6f3d70497e106927c |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H2001-0084 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H2001-0005 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H59-0009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00333 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H59-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate | 2019-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9456b257c89005ef81e12ed15597a24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dfd64425eb5a2978516a8652fe29c85 |
| publicationDate | 2019-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2019333728-A1 |
| titleOfInvention | Shielded dual substrate mems plate switch and method of manufacture |
| abstract | Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have at least one shunt bar located at a nodal line of a vibrational mode of the deformable plate, so that the shunt bar remains relatively stationary when the plate is vibrating in that vibrational mode. The second substrate may have semiconductor integrated circuits formed thereon. The second substrate may also have a shielding layer formed thereon, such as to improve the impedance characteristics of the device. |
| priorityDate | 2018-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.