http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019301950-A1

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publicationDate 2019-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2019301950-A1
titleOfInvention Wide-range load sensor using quartz resonator
abstract In a load sensor detecting a magnitude of an external load applied in a direction parallel to a sheet shape of a sheet-shaped quartz crystal resonator, the load sensor comprising: a quartz crystal resonator layer including the sheet-shaped quartz crystal resonator and a pair of electrode portions on a pair of surfaces opposite to each other in a plate thickness direction of the quartz crystal resonator; and a pair of holding layers disposed to sandwich both sides of the sheet shape of the quartz crystal resonator layer and causing a displacement in substantially the same amount as the quartz crystal resonator layer when the external load is applied to the quartz crystal resonator layer, the holding layers and the quartz crystal resonator layer are made of materials having substantially equivalent rates of thermal expansion.
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