| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_617b424442a186dd7f473767729dbf0c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L35-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N10-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N10-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N10-855 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-698
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-6888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L35-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N10-01 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-698
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-688
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-34 |
| filingDate |
2019-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6382ab56514d966de33e915c2b097d7e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78b0872a15986073826e4e795c94baa4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef2b5136d98d042ff9a60f18c4c1c345 |
| publicationDate |
2019-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2019301906-A1 |
| titleOfInvention |
Thermal fluid flow sensor |
| abstract |
We disclose herewith a heterostructure-based sensor comprising a substrate comprising an etched portion and a substrate portion; a device region located on the etched portion and the substrate portion; the device region comprising at least one membrane region which is an area over the etched portion of the substrate. At least one heterostructure-based element is located at least partially within or on the at least one membrane region, the heterostructure-based element comprising at least one two dimensional (2D) carrier gas. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102019132829-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102019132829-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10876903-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020411501-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11605623-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11073415-B2 |
| priorityDate |
2018-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |