Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_887e125008cf84c53554d9e68cf7f02b |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-403 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4557 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4418 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
filingDate |
2019-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59da8bb131b2c66b55cece409bc89614 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54a5ec77d2eefb23e355e0ae73ab9a36 |
publicationDate |
2019-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2019301008-A1 |
titleOfInvention |
System and process for chemical vapor deposition |
abstract |
A chemical vapor deposition method comprises flowing a carrier liquid through a reactor. A fluid comprising one or more reactants is introduced into the carrier liquid. The fluid is at a first temperature and first pressure and is sufficiently immiscible in the carrier liquid so as to form a plurality of microreactors suspended in the carrier liquid. Each of the microreactors comprise a discrete volume of the fluid and have a surface boundary defined by an interface of the fluid with the carrier liquid. The fluid is heated and optionally pressurized to a second temperature and second pressure at which a chemical vapor deposition reaction occurs within the microreactors to form a plurality of chemical vapor deposition products. The plurality of chemical vapor deposition products are separated from the carrier liquid. A system for carrying out the method of the present disclosure is also taught. |
priorityDate |
2016-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |