Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
filingDate |
2017-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11147c4bacf2b61803909e1762156a7e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edeba8e401376e25e59316f514ae8422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d857861e23ce21d53c59c1a5b20a807d |
publicationDate |
2019-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2019256742-A1 |
titleOfInvention |
Polishing composition, method for producing polishing composition, and polishing method |
abstract |
The present invention provides a polishing composition that can polish an object to be polished at a high polishing speed with fewer scratches (defects). The present invention relates to a polishing composition including silica and a dispersing medium, the polishing composition having, when analyzed by pulse NMR spectroscopy, a specific relaxation rate (R 2sp ) of from 1.60 to 4.20 as determined by the following Formula (1): n R 2sp =( R (silica) )/( R (medium) )−1 Formula (1):n n wherein R( silica) represents the reciprocal of the relaxation time of silica (unit:/millisecond), and R( medium) represents the reciprocal of the relaxation time of the dispersing medium (unit:/millisecond). |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11773291-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11767448-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11518920-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11499078-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11492526-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11505731-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113912070-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11566150-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11572490-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11352523-B2 |
priorityDate |
2016-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |