Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_025c047e79d24bc9d2f9b2825d9b753d |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-175 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02102 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-175 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0656 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02 |
filingDate |
2017-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eed0f78fd195af9c45e590b6a061efff http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d256914111dc1b7fe35629fb28c99c7b |
publicationDate |
2019-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2019212300-A1 |
titleOfInvention |
Bulk acoustic wave resonator based sensor |
abstract |
An integrated circuit is disclosed. The integrated circuit comprises a silicon substrate, a sensor comprising a bulk acoustic wave resonator and an acoustic mirror disposed between the bulk acoustic wave resonator and the substrate, and a CMOS circuit supported by substrate and operatively connected to the sensor. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110708035-A |
priorityDate |
2016-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |