| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f08f9f99db22bcca24642899da9fba65 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-359
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-626
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3504 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-359
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-3504
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00 |
| filingDate |
2017-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe52d79d706e0b9826944444fd956f4a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a43deb00293091b10684587f69741345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_294d3fef230ce92b582f3b4638cd71ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ad355aa1d45b7432e7c41b1d1321213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_517b5fec527dd1dfec19153986674d25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3286d5533e868fc0bf92a2618a46a8ad |
| publicationDate |
2019-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2019178860-A1 |
| titleOfInvention |
Miniature gas sensor |
| abstract |
The present invention provides a miniature gas sensor, which comprises a gas sensor chip. The gas sensor chip includes a hollow structure on the back. An insulating layer is disposed below the sensing material. A miniature heating device is disposed surrounding the sensing material. The sensing material is adhered to the sensing electrodes. The sensing material includes two metal oxide semiconductors or a compound structure of the sensing layer having a metal oxide semiconductor and a reaction layer with a rough surface. An interface layer is sandwiched between the two metal oxide layers for increasing the efficiency in sensing gas. The gas sensor according to the present invention can be implemented on silicon substrate with hollow structures. In addition, the size of the chip can be miniaturized. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114324225-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11513091-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020393431-A1 |
| priorityDate |
2017-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |